Dr. Uthayasankaran Peralagu Profile

Dr. Uthayasankaran Peralagu

at imec

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 20 March 2019 Paper

Fabrication challenges and opportunities for high-mobility materials: from CMOS applications to emerging derivative technologies

N. Collaert, A. Alian, B. De Jaeger, U. Peralagu, A. Vais, A. Walke, L. Witters, H. Yu, E. Capogreco, K. Devriendt, T. Hopf, K. Kenis, G. Mannaert, A. Milenin, A. Peter, F. Sebaai, L. Teugels, D. van Dorp, K. Wostyn, N. Horiguchi, N. Waldron

Proceedings Volume 10963, 1096305 (2019) https://doi.org/10.1117/12.2511746

KEYWORDS: Germanium, Gallium nitride, Gallium arsenide, CMOS technology, Field effect transistors, Fin field effect transistors, Group III-V semiconductors

Read Abstract +

Proceedings Article | 21 March 2017 Presentation + Paper

Plasma processing of III-V materials for energy efficient electronics applications

Iain Thayne, Xu Li, David Millar, Yen-Chun Fu, Uthayasankararan Peralagu

Proceedings Volume 10149, 101490R (2017) https://doi.org/10.1117/12.2257863

KEYWORDS: Etching, Plasma, Indium gallium arsenide, Transistors, Plasma etching, Argon, Atomic layer deposition, Focus stacking software, Compound semiconductors, Capacitors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years