Dr. Vladimir Makarchuk Profile

Dr. Vladimir Makarchuk

at Bauman Moscow State Technical Univ.

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Publications (1)

Proceedings Article | 30 December 2016 Paper

Simulation of heavy charged particles damage on MEMS

V. Shakhnov, A. Glushko, V. Makarchuk, L. Zinchenko, V. Terekhov, S. Mikhaylichenko

Proceedings Volume 10224, 102241C (2016) https://doi.org/10.1117/12.2266750

KEYWORDS: Microelectromechanical systems, Particles, Fractal analysis, Dielectrics, Silicon, Neon, Computer simulations, Semiconductors, Electrons, Ions

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