Mr. Vladimir O. Militsin Profile

Vladimir O. Militsin

at MV Lomonosov Moscow State Univ

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Author

Publications (6)

Proceedings Article | 4 October 2016 Paper

Correction of placement error in EBL using model based method

Sergey Babin, Sergey Borisov, Vladimir Militsin, Tadashi Komagata, Tetsuro Wakatsuki

Proceedings Volume 9985, 998513 (2016) https://doi.org/10.1117/12.2256908

KEYWORDS: Calibration, Electron beam lithography, Photomasks, Electron beams, Data corrections, Data modeling, Physics, Systems modeling, Monte Carlo methods, Human-machine interfaces

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Proceedings Article | 10 May 2016 Paper

Model based correction of placement error in EBL and its verification

Sergey Babin, Sergey Borisov, Vladimir Militsin, Tadashi Komagata, Tetsuro Wakatsuki

Proceedings Volume 9984, 998406 (2016) https://doi.org/10.1117/12.2244793

KEYWORDS: Calibration, Electron beam lithography, Photomasks, Electrons, Data corrections, Electron beams, Physics, Monte Carlo methods, Systems modeling, Distortion

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Proceedings Article | 1 October 2013 Paper

Simulation and correction of resist charging due to fogging in electron-beam lithography

Sergey Babin, Sergey Borisov, Vladimir Militsin, Elena Patyukova

Proceedings Volume 8880, 888019 (2013) https://doi.org/10.1117/12.2032177

KEYWORDS: Monte Carlo methods, Electron beam lithography, Objectives, Scattering, Electrodes, Critical dimension metrology, Optical spheres, Lithography, Optical simulations, Scanning electron microscopy

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Proceedings Article | 9 June 2010 Paper

Comprehensive simulation of SEM images taking into account local and global electromagnetic fields

Sergey Babin, Sergey Borisov, Hiroyuki Ito, Andrei Ivanchikov, Dmitri Matison, Vladimir Militsin, Makoto Suzuki

Proceedings Volume 7729, 77290W (2010) https://doi.org/10.1117/12.859951

KEYWORDS: Scanning electron microscopy, Monte Carlo methods, Electrodes, Silica, Electromagnetism, Sensors, Scattering, Carbon, Nanofibers, 3D modeling

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Proceedings Article | 12 April 2005 Paper

Beam breakup and filament initiation induced by femtosecond pulse transmission through water aerosol

V. Militsin, L. Kouzminsky, Valerii Kandidov

Proceedings Volume 5708, (2005) https://doi.org/10.1117/12.593858

KEYWORDS: Atmospheric particles, Aerosols, Laser scattering, Scattering, Atmospheric propagation, Light scattering, Atmospheric modeling, Femtosecond phenomena, Diffraction, Pulsed laser operation

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Showing 5 of 6 publications

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