KEYWORDS: Waveguides, Channel waveguides, Silver, Ion exchange, Refractive index, Ions, Near field, Near field optics, Channel projecting optics, Scanning electron microscopy
Two-step field-assisted ion-exchanged waveguides have been fabricated on a glass substrate. The concentration profiles
of the exchanged ions were measured with electron microprobe. The waveguides were characterized under scanning
electron microscope and optical microscope for the investigation of burying structures. Guiding mode patterns were
characterized with near-field measurement, where symmetric profiles were observed for the burying-type waveguide.
The refractive index profiles were also measured with a modified end-fire coupling method. The relation between ion
concentration profiles and index profiles were compared for the waveguides with different fabrication process.
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