We report a precise and stable laser beam positioning method with a high scanning speed by a pixelated binary grating (PBG) realized by a compact on-off state digital micromirror device (DMD). The overall procedure for PBG pattern generation is proposed, analyzed, and experimentally verified. The resulting performances correspond to an angular resolution of 0.01 deg and angular repeatability of ± 2.54 × 10 − 4 deg over a beam steering range of ± 7.5 deg. The scanning speed of 40 deg/s is achieved in continuous scanning with a resolution of 0.01 deg. Arbitrary positions can be targeted in the scanning range with DMD’s frame rate of 4000 Hz. To verify its applicability in precision metrology, absolute distances to multiple off-axial targets were determined in parallel with a high speed. This method will open a wider application of DMD in precision LIDARs, three-dimensional calibration of precision machines, and high-resolution laser patterning.
In this study, we develop a 3D coordinate measurement system based on a multilateration technique and an absolute distance metrology for a mobile machine platform. Since the multilateration only uses distance values without angle measurements, it is possible to make 3D coordinate measurements with high accuracy in a large area. In addition, absolute distance is suitable for industrial application because of enabling real-time continuous measurement after the obstruction. The system is composed of four laser tracking stations and a four channel absolute distance meter which is a fs pulse laser based high accuracy absolute distance measurement. In order to measure 3D coordinate of targets, each tracker measures a distance value with real time tracking, and multilateration algorithm is applied to derive 3D coordinate values using the measured distance values. This paper introduces the multiple absolute distances based 3D coordinate measurement system and discusses in detail.
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