Dr. Xavier Lafontan Profile

Dr. Xavier Lafontan

President at NOVA MEMS

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 5 May 2011 Paper

Mechanical properties of 1 um-thick metallic freestanding coatings measured by in-plane uniaxial stress

Thibaut Fourcade, Cedric Seguineau, Jean Michel Desmarres, Talal Masri, Joël Alexis, Olivier Dalverny, Julien Martegoutte, Xavier Lafontan

Proceedings Volume 8066, 806609 (2011) https://doi.org/10.1117/12.886879

KEYWORDS: Aluminum, Thin films, Silicon, Semiconducting wafers, Neodymium, Annealing, Etching, Silicon films, Thin film manufacturing, Manufacturing

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SPIE Journal Paper | 1 October 2010

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

Adrien Broué, Jérémie Dhennin, Frédéric Courtade, Christel Dieppedal, Patrick Pons, Xavier Lafontan, Robert Plana

JM3, Vol. 9, Issue 04, 041102, (October 2010) https://doi.org/10.1117/12.10.1117/1.3504663

KEYWORDS: Resistance, Switches, Microelectromechanical systems, Interfaces, Gold, Physics, Ruthenium, Metals, Reliability

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Proceedings Article | 5 February 2010 Paper

Characterization of Au/Au, Au/Ru, and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology

Adrien Broue, Jérémie Dhennin, Frédéric Courtade, Christel Dieppedale, Patrick Pons, Xavier Lafontan, Robert Plana

Proceedings Volume 7592, 75920A (2010) https://doi.org/10.1117/12.840979

KEYWORDS: Resistance, Switches, Microelectromechanical systems, Gold, Interfaces, Ruthenium, Physics, Metals, Reliability, Virtual colonoscopy

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Proceedings Article | 5 February 2010 Paper

A new method for hermeticity testing of wafer-level packaging

Djemel Lellouchi, Jérémie Dhennin, Xavier Lafontan, David Veyrie, Adrien Broue, Jean-François Le Neal, Francis Pressecq

Proceedings Volume 7592, 759203 (2010) https://doi.org/10.1117/12.839860

KEYWORDS: Helium, NOx, Microelectromechanical systems, FT-IR spectroscopy, Absorption, Spectroscopy, Infrared spectroscopy, Optical testing, Silicon, Packaging

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Proceedings Article | 23 December 2003 Paper

Reliability issues of an accelerometer under environmental stresses

Petra Schmitt, Francis Pressecq, Guy Perez, Xavier Lafontan, Jean Marc Nicot, Daniel Esteve, Jean Yves Fourniols, Henri Camon, Coumar Oudea

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524575

KEYWORDS: Microelectromechanical systems, Reliability, Commercial off the shelf technology, Finite element methods, 3D modeling, Physics, Failure analysis, Profilometers, Capacitance, Material characterization

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Proceedings Article | 19 April 2002 Paper

Environmental test bench for reliability studies: influence of the temperature on rf switches with metallic membranes

Xavier Lafontan, Christophe Le Touze, Beatrice Wenk, Inna Kolesnik, Francis Pressecq, Guy Perez, Jean-Marc Nicot, Muriel Dardalhon, Sebastien Rigo

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462864

KEYWORDS: Switches, Bridges, Dielectrics, Temperature metrology, Microelectromechanical systems, Reliability, Metals, Gold, Optical simulations

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Proceedings Article | 2 October 2001 Paper

CNES reliability approach for the qualification of MEMS for space

Francis Pressecq, Xavier Lafontan, Guy Perez, Jean-Pierre Fortea

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442990

KEYWORDS: Microelectromechanical systems, Reliability, Capacitance, Computer aided design, Failure analysis, Prototyping, Electrodes, Commercial off the shelf technology, Standards development, Space operations

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Proceedings Article | 2 October 2001 Paper

Physical and reliability issues in MEMS microrelays with gold contacts

Xavier Lafontan, Francis Pressecq, Guy Perez, Christian Dufaza, Jean Michel Karam

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443006

KEYWORDS: Relays, Gold, Actuators, Reliability, Microelectromechanical systems, Microrelays, Resistance, Switches, Electromagnetism, Dielectric polarization

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Proceedings Article | 5 April 2001 Paper

Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs

Xavier Lafontan, Christian Dufaza, Michel Robert, Francis Pressecq, Guy Perez

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425354

KEYWORDS: Switches, Gold, Resistance, Microelectromechanical systems, Relays, Actuators, Reliability, Polarization, Electrons

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Proceedings Article | 11 August 2000 Paper

RF MEMS microswitches design and characterization

Xavier Lafontan, Christian Dufaza, Michel Robert, Guy Perez, Francis Pressecq

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395602

KEYWORDS: Resistance, Gold, Switches, Microelectromechanical systems, Plasma etching, Electrodes, Actuators, Dielectrics, Optical spheres, Plasma

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Proceedings Article | 10 April 2000 Paper

MEMS physical analysis in order to complete experimental results return

Xavier Lafontan, Christian Dufaza, Guy Perez, Francis Pressecq

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382299

KEYWORDS: Microelectromechanical systems, Polishing, Confocal microscopy, Computer aided design, Reliability, Epoxies, Gold, Failure analysis, Glasses, 3D vision

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Showing 5 of 11 publications

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