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Xiao Luo
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Publications (1)
Proceedings Article | 19 December 2022 Poster + Paper
Simulation verification for the cause of overlapped interference fringes in homogeneity measurement of quartz substrate
Proceedings Volume 12319, 123191D (2022) https://doi.org/10.1117/12.2643369
KEYWORDS: Quartz, Beam expanders, Beam splitters, Wavefronts, Interferometers, Photomasks, Optical components, Fizeau interferometers, Collimation, Zemax
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