Micromechanical accelerometers are microscale sensors, whose operating principles and design theories are similar to those of conventional accelerometers. However, surface forces between mechanical structures become more important factors that affect the performance as microstructural size decreases. This paper discusses the effects of the electrostatic forces on the performance of open- and closed- loop micromechanical accelerometers, which are stiffness and damping change, and difference of the transfer function of the system.
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