Dr. Xiaomei Chen Profile

Dr. Xiaomei Chen

at Academy of Opto-Electronics CAS

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Publications (3)

Proceedings Article | 26 March 2019 Paper

Detection of particle defect components on silicon wafer with laser induced breakdown spectroscopy combined laser cleaning technology

Lituo Liu, Xiaoya Yu, Weihu Zhou, Xiaomei Chen, Rongyi Ji, Guannan Li

Proceedings Volume 10959, 109592A (2019) https://doi.org/10.1117/12.2511169

KEYWORDS: Particles, Semiconducting wafers, Silicon, Pulsed laser operation, Spectroscopy, Laser applications, Copper, Laser systems engineering

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Proceedings Article | 14 May 2012 Paper

Atomic force microscope cantilevers as encoder for real-time displacement measurements

Xiaomei Chen, Helmut Wolff, Ludger Koenders

Proceedings Volume 8378, 83780C (2012) https://doi.org/10.1117/12.923005

KEYWORDS: Computer programming, Atomic force microscopy, Head, Signal processing, Phase shifts, Electronics, Atomic force microscope, Electronic filtering, Control systems, Scanning tunneling microscopy

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Proceedings Article | 30 October 2001 Paper

Combined fluorescence decay time and fiber Bragg grating temperature and strain sensing

Kenneth Grattan, Scott Wade, David Forsyth, Tong Sun, Xiaomei Chen

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447329

KEYWORDS: Sensors, Fiber Bragg gratings, Luminescence, Erbium, Temperature metrology, Fiber optics sensors, Calibration, Optical fibers, Ytterbium, Telecommunications

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