Mr. Xiaoran Zhang Profile

Xiaoran Zhang

at North China Univ of Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 March 2020 Paper

Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Rui Chen, Xiaoran Zhang, Hans-Juergen Stock, Yayi Wei

Proceedings Volume 11323, 113232J (2020) https://doi.org/10.1117/12.2551897

KEYWORDS: Extreme ultraviolet, Compressed sensing, Extreme ultraviolet lithography, Computer simulations

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Keywords/Phrases