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Xiaowei Guo
at Zhejiang Institute of Quality Sciences
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Publications (1)
Proceedings Article | 27 November 2024 Poster + Paper
Research progress on ultra-precision measurement technology based on line chromatic confocal sensors at micro-nano scale
Xiaowei Guo, Haotian Guo, Xinke Xu, Ning Chen, Lei Yao, Huaichu Ye, Gangxiang Guo, Ting Chen
Proceedings Volume 13237, 132370W (2024) https://doi.org/10.1117/12.3030830
KEYWORDS: Confocal microscopy, Colorimetry, Sensors, Light sources, Point clouds, Manufacturing, 3D metrology, Optical scanning systems, Calibration, Surface roughness
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