The distribution of thermal mismatch strain and radius of curvature of CdTe/Si(211) sample were analyzed by theoretical calculation and laser interferometer measurement at room temperature. The theoretical calculation results showed that the strain profiles and curvature radius of CdTe grew on asymmetry Si(211) surface are asymmetric along in-plane direction along [1-1-1] and [01-1]. The laser interference measurement result of the CdTe/Si(211) sample showed that the tensile strain in CdTe epilayer is smaller than the theoretical calculation. Further study showed that the plastic deformation with positive direction of surface curvature radius was formed during the high temperature deoxidation process of silicon substrate. The plastic deformation of Si substrate reduced the bending degree of CdTe/Si (211) heterostructure, so the thermal mismatch strain was also reduced.
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