An advanced wavelength calibration process with higher wavelength accuracy is developed based on the conventional
calibration method of micro-spectrometers with multichannel detectors. The deficiencies of the conventional method in
acquiring sufficient well-spaced and adequately accurate wavelength-pixel data for calibration are analyzed. And three
steps are added to the conventional method before the final pixel-wavelength fit is carried out. First, segmented data
collection is carried out to ensure sufficient well-spaced lines for calibration. Second, sub-pixel analysis is executed to
increase sampling rate. Third, peak fit is implemented to acquire more accurate central wavelength positions. The
simulated experiment was based on a compact spectrometer with a crossed Czerny-Turner optical design. Mercury and
Argon line spectra are used as wavelength standards. A linear image sensor with 1024 pixels each 25μm in width is used
as the detector. In the new calibration process the whole spectral region was divided into two segments with different
integral time of the detector; the sampling rate was increased by 2 times by sub-pixel analysis; and log-normal function
is applied in the peak fit. The results show that by applying the new method, the wavelength accuracy improves from
above 1.0nm to around 0.6nm.
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