Mr. Yuki Ojima Profile

Yuki Ojima

at Hitachi High-Tech Corp

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Publications (2)

SPIE Journal Paper | 1 March 2023

Quantification of three-dimensional pattern-shape variation with CD-SEM top-down image

Mayuka Osaki, Kenji Yasui, Maki Tanaka, Hitoshi Namai, Yuki Ojima

JM3, Vol. 22, Issue 02, 021008, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.021008

KEYWORDS: Semiconducting wafers, 3D image processing, Scanning electron microscopy, Education and training, Signal detection, Electron beams, Tolerancing, Image analysis, Target detection, Semiconductors

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Proceedings Article | 13 June 2022 Poster

A method for quantifying the three-dimensional shape of circuit patterns with a top-down CD-SEM image

Kenji Yasui, Mayuka Osaki, Hitoshi Namai, Yuki Ojima, Masami Ikota, Maki Tanaka

Proceedings Volume PC12053, PC120530R (2022) https://doi.org/10.1117/12.2614738

KEYWORDS: 3D metrology, 3D image processing, Scanning electron microscopy, 3D acquisition, Electron microscopes, Semiconducting wafers, Optical lithography, Image processing, Critical dimension metrology, Visualization

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