Dr. Yan Chen Profile

Dr. Yan Chen

Research Scientist at Tokyo Electron America Inc

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Publications (7)

Proceedings Article | 25 March 2008 Paper

Low-k n&k variation impact on CD accuracy of scatterometry

Yan Chen, Masahiro Yamamoto, Dmitriy Likhachev, Gang He, Akihiro Sonoda, Vi Vuong

Proceedings Volume 6922, 69223R (2008) https://doi.org/10.1117/12.773133

KEYWORDS: Scatterometry, Critical dimension metrology, Dielectrics, Semiconducting wafers, Refractive index, Optical properties, Scatter measurement, Data modeling, Semiconductor manufacturing, Process modeling

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Proceedings Article | 5 April 2007 Paper

OCD metrology by floating n/k

Shinn-Sheng Yu, Jacky Huang, Chih-Ming Ke, Tsai-Sheng Gau, Burn Lin, Anthony Yen, Lawrence Lane, Vi Vuong, Yan Chen

Proceedings Volume 6518, 65183C (2007) https://doi.org/10.1117/12.713341

KEYWORDS: Metrology, Semiconducting wafers, Critical dimension metrology, Lithography, Thin films, Scanning electron microscopy, Process control, Deposition processes, Roentgenium, Error analysis

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Proceedings Article | 13 April 2005 Paper

Enhancing the optical nonlinearity by 1D thin-film photonic crystals with Kerr defect cavities

Yan Chen, Yongdong Liu, Steve Blair

Proceedings Volume 5733, (2005) https://doi.org/10.1117/12.592031

KEYWORDS: Nonlinear optics, Refractive index, Phase shifts, Photonic crystals, Thin films, Bistability, Crystals, Mirrors, Nonlinear crystals, Transmittance

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Proceedings Article | 21 June 2002 Paper

Integrated optical/microfluidic platform for real-time affinity biosensing

Layne Williams, Yan Chen, Steve Blair

Proceedings Volume 4626, (2002) https://doi.org/10.1117/12.472106

KEYWORDS: Microfluidics, Luminescence, Waveguides, Biosensing, Optical microcavities, Sensors, Biological research, Integrated optics, Fluorescence spectroscopy, Optical lithography

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Proceedings Article | 6 June 2002 Paper

Ring resonators as nonlinear phase-shifting elements

Yan Chen, Steve Blair

Proceedings Volume 4629, (2002) https://doi.org/10.1117/12.469496

KEYWORDS: Resonators, Phase shifts, Phase shifting, Resonance enhancement, Nonlinear optics, Absorption, Nonlinear response, Signal attenuation, Refractive index, Optical components

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Proceedings Article | 4 June 2002 Paper

Resonant cavity optical biosensors for the detection of nucleic acid hybridization

Marc Airola, Steve Blair, Yan Chen, Jack Davis, Layne Williams

Proceedings Volume 4625, (2002) https://doi.org/10.1117/12.469793

KEYWORDS: Luminescence, Optical microcavities, Waveguides, Biosensing, Dielectrics, Spherical lenses, Biosensors, Absorption, Biological research, Sensors

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Proceedings Article | 21 May 2001 Paper

Biosensing with optical microcavities

Steve Blair, Yan Chen

Proceedings Volume 4265, (2001) https://doi.org/10.1117/12.427963

KEYWORDS: Luminescence, Waveguides, Optical microcavities, Biosensing, Sensors, Dielectrics, Biological research, Biosensors, Factor analysis, Absorption

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Showing 5 of 7 publications

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