Dr. Yan Feng Profile

Dr. Yan Feng

at Synopsys, Inc.

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Advances in full-chip three-dimensional resist modeling for low k1 EUV and DUV lithography

Elizabeth Grubbs, Bernd Kuechler, Hyesook Hong, Enas Sakr, Lena Zavyalova, Folarin Latinwo, Delian Yang, Linghui Wu, Yan Feng, Kevin Lucas

Proceedings Volume 12954, 129540S (2024) https://doi.org/10.1117/12.3013125

KEYWORDS: 3D modeling, Modeling, Lithography, Data modeling, Calibration, Deep ultraviolet, Optical proximity correction, Extreme ultraviolet, Photoresist processing, Shrinkage

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