CONFERENCE PROCEEDINGS
Advanced Search
Yanjiang Li
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 December 2024 Paper
An efficient way towards massive CD-SEM metrology recipes based on line scan analysis: release your hands
Zhiping Mou, Kun Ren, Dawei Gao, Shibin Xu, Yanjiang Li, Chenwei Sun, Bo Pang
Proceedings Volume 13423, 1342307 (2024) https://doi.org/10.1117/12.3052328
KEYWORDS: Windows, Metrology, Scanning electron microscopy, Optical alignment, Manufacturing, Line scan image sensors, Feature extraction, Semiconducting wafers, Image quality, Analytical research
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top