Dr. Yanqing Wu Profile

Dr. Yanqing Wu

at Shanghai Institute of Applied Physics CAS

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Author

Publications (4)

Proceedings Article | 6 June 2024 Poster

The exploration of novel 3D lithography by utilizing the electron beam driving

Zhenjiang Li, Beining Li, Yanqing Wu, Renzhong Tai, Yong Wang

Proceedings Volume PC12995, PC129950F (2024) https://doi.org/10.1117/12.3017385

KEYWORDS: Lithography, Electron beams, Electron beam lithography, 3D printing, Printing, Extreme ultraviolet lithography, Additive manufacturing, X-rays, X-ray technology, X-ray optics

SPIE Journal Paper | 3 November 2020

Design of silicon-based integrated gradient index lens

Lei Zhang, Yuanhe Sun, Huijuan Xia, Lin Wang, Shuqi Cao, Shumin Yang, Yanqing Wu, Renzhong Tai

JNP, Vol. 14, Issue 04, 046005, (November 2020) https://doi.org/10.1117/12.10.1117/1.JNP.14.046005

KEYWORDS: Silicon, GRIN lenses, Silicon films, Waveguides, Optical components, Refractive index, Photonic integrated circuits, Lens design, Chemical elements, Planar waveguides

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Proceedings Article | 23 August 2017 Paper

Analysis on partial coherence propagation using the four-dimensional coherence function

Xiangyu Meng, Chaofan Xue, Huaina Yu, Yong Wang, Yanqing Wu, Renzhong Tai

Proceedings Volume 10388, 103880W (2017) https://doi.org/10.1117/12.2272384

KEYWORDS: Wave propagation, Zone plates, Coherence (optics), Wavefronts, Beam propagation method, X-rays, Optical simulations, Free space, Mirrors, X-ray diffraction

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Proceedings Article | 12 May 2015 Paper

Development of XUV multilayer gratings with high resolution and high efficiency

Xiaowei Yang, Qiushi Huang, Igor Kozhevnikov, Zhanshan Wang, Jun Zhao, Yanqing Wu

Proceedings Volume 9510, 95100Y (2015) https://doi.org/10.1117/12.2178843

KEYWORDS: Diffraction gratings, Diffraction, Extreme ultraviolet, Multilayers, Mirrors, Reflectivity, Interfaces, Silicon, Crystals, Polarizability

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