Mr. Yijiang Shen Profile

Yijiang Shen

Student at Univ of Hong Kong

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Publications (2)

Proceedings Article | 25 May 2010 Paper

Aberration-aware robust mask design with level-set-based inverse lithography

Yijiang Shen, Ngai Wong, Edmund Lam

Proceedings Volume 7748, 77481U (2010) https://doi.org/10.1117/12.863973

KEYWORDS: Photomasks, Monochromatic aberrations, Lithography, Optical proximity correction, Point spread functions, Imaging systems, Mathematical modeling, Algorithm development, Computer simulations, Resolution enhancement technologies

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Proceedings Article | 9 February 2006 Paper

Simultaneous photometric correction and defect detection in semiconductor manufacturing

Yijiang Shen, Edmund Lam

Proceedings Volume 6070, 60700F (2006) https://doi.org/10.1117/12.640138

KEYWORDS: Defect detection, Image registration, Statistical modeling, Single crystal X-ray diffraction, Sensors, Semiconductor manufacturing, Light sources and illumination, Algorithm development, Image processing, Machine vision

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