Mr. Yongyu Wu Profile

Yongyu Wu

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Publications (3)

Proceedings Article | 10 December 2024 Paper

Fast layout pattern matching using spatial indexing

Liuye Meng, Kun Ren, Yongyu Wu, Dawei Gao, Zheju Yan

Proceedings Volume 13423, 1342306 (2024) https://doi.org/10.1117/12.3052326

KEYWORDS: Lithography, Semiconductors, Integrated circuits, Education and training, Optical proximity correction, Electronic design automation

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Proceedings Article | 10 December 2024 Paper

Accurate SEM contour-based measurement and analysis of SRAM patterns for enhanced design optimization

Yongyu Wu, Miaohong Yao, Shibin Xu, Kun Ren, Dawei Gao, Xiaoci Li, Ken Chen, Qijian Wan, Chunshan Du

Proceedings Volume 13423, 1342308 (2024) https://doi.org/10.1117/12.3052330

KEYWORDS: Scanning electron microscopy, Contour extraction, Design, Transistors, Image processing, Critical dimension metrology, Electronic design automation

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Proceedings Article | 10 December 2024 Paper

SEM contour extraction application on OPC model of contact layer

Xinyuan Zhang, Miaohong Yao, Shibin Xu, Zheju Yan, Kun Ren, Yongyu Wu, Dawei Gao, Ken Chen, Xiangshang Zhu, Chenwei Sun, Feng Shao

Proceedings Volume 13423, 134230E (2024) https://doi.org/10.1117/12.3052691

KEYWORDS: Data modeling, Optical proximity correction, Scanning electron microscopy, Performance modeling, Contour extraction, Semiconducting wafers, Image processing, Critical dimension metrology, Modeling

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