Mr. Yuan Pin Liao Profile

Yuan Pin Liao

at Synopsys Taiwan Co Ltd

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Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Advanced regression OPC model setup

Tony Hu, Terry Hsuan, Elvis Yang, Li-Jin Chen, Tony Chao, Y. Liao, Elsley Tan

Proceedings Volume 12954, 1295419 (2024) https://doi.org/10.1117/12.3008958

KEYWORDS: Autoregressive models, Optical proximity correction, Performance modeling, Education and training, 3D modeling, Calibration, Neurons, Data modeling, Modeling, Overfitting

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Proceedings Article | 23 March 2020 Paper

EUV OPC methodology for beyond 20nm memory cell by simulation data

Jiunhau Fu, Chiang Lin Shih, Chun Cheng Liao, Eric Huang, Elsley Tan, John Tsai, Ming Yun Chen, Yuan Pin Liao, Seung Hee Baek

Proceedings Volume 11323, 113232H (2020) https://doi.org/10.1117/12.2551669

KEYWORDS: Optical proximity correction, Extreme ultraviolet, Molybdenum, Photomasks, Data modeling, Critical dimension metrology, Source mask optimization, Semiconducting wafers, EUV optics, Array processing

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