Dr. Yuandong Gu Profile

Dr. Yuandong Gu

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Publications (2)

Proceedings Article | 10 December 2024 Paper

Research on optical proximity correction with embedded coordinate convolution module

Yongkang Liu, Wei Zhao, Ruixiang Yan, Kai Ni, Yuandong Gu, Jianlin Li

Proceedings Volume 13423, 1342302 (2024) https://doi.org/10.1117/12.3052204

KEYWORDS: Optical proximity correction, Convolution, Lithography, Photoresist materials, Mathematical modeling, Education and training, Deep learning, Source mask optimization, Semiconducting wafers, Optical lithography

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Proceedings Article | 21 January 2022 Paper

Aluminum scandium nitride waveguide in the near-infrared

Xiangchao Zhang, Shaonan Zheng, Qize Zhong, Lianxi Jia, Zhengji Xu, Yuan Dong, Ting Hu, Yuandong Gu

Proceedings Volume 12154, 121540H (2022) https://doi.org/10.1117/12.2626712

KEYWORDS: Waveguides, Refractive index, Channel waveguides, Aluminum nitride, Waveguide modes, Silicon photonics, Silicon

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