Dr. Yuri S. Uritsky Profile

Dr. Yuri S. Uritsky

Director at Applied Materials Inc

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Author

Publications (5)

Proceedings Article | 3 June 2010 Paper

Low tip damage AFM technique development for nano structures characterization

Biao Liu, Charles Wang, Po-Fu Huang, Yuri Uritsky

Proceedings Volume 7729, 77290O (2010) https://doi.org/10.1117/12.853948

KEYWORDS: Atomic force microscopy, Silicon, Particles, Oxides, Optical spheres, Adaptive optics, Quartz, Thin films, Image resolution, Etching

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Proceedings Article | 25 March 2008 Paper

Wafer edge polishing process for defect reduction during immersion lithography

Motoya Okazaki, Raymond Maas, Sen-Hou Ko, Yufei Chen, Paul Miller, Mani Thothadri, Manjari Dutta, Chorng-Ping Chang, Abraham Anapolsky, Chris Lazik, Yuri Uritsky, Martin Seamons, Deenesh Padhi, Wendy Yeh, Stephan Sinkwitz, Chris Ngai

Proceedings Volume 6922, 69223A (2008) https://doi.org/10.1117/12.773113

KEYWORDS: Semiconducting wafers, Polishing, Immersion lithography, Particles, Lithography, Inspection, Surface finishing, Manufacturing, Etching, Chemistry

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Proceedings Article | 27 August 1999 Paper

New sample preparation method for improved defect characterization yield on bare wafers

Christophe Roudin, Patrick Kinney, Yuri Uritsky

Proceedings Volume 3884, (1999) https://doi.org/10.1117/12.361331

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Navigation systems, Scanners, Particles, Statistical analysis, Defect detection, Optical alignment, Imaging systems, Yield improvement

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Proceedings Article | 27 August 1998 Paper

Locating defects on wafers for analysis by SEM/EDX, AFM, and other microanalysis techniques

Patrick Kinney, Yuri Uritsky

Proceedings Volume 3509, (1998) https://doi.org/10.1117/12.324413

KEYWORDS: Semiconducting wafers, Statistical analysis, Scanning electron microscopy, Defect detection, Laser marking, Atomic force microscopy, Wafer-level optics, Particles, Light scattering, Scanners

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Proceedings Article | 27 May 1996 Paper

Comprehensive characterization of micro-arcing related particles

Yuri Uritsky, J. Pan, Terry Francis, C. Brundle

Proceedings Volume 2714, (1996) https://doi.org/10.1117/12.240417

KEYWORDS: Particles, Micro raman spectroscopy, Confocal microscopy, Ceramics, Chromium, Luminescence, Microscopes, Scanning electron microscopy, Aluminum, Metals

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