We evaluated the charge-separated energy spectra of the suprathermal highly charged gadolinium (Gd) ions as debris from a laser-produced plasma (LPP). Laser pulses with pulse durations of 6 ns and 150 ps were irradiated to a solid planar Gd target. Charge-separated suprathermal Gd ions from an LPP were measured using an electrostatic energy analyzer (ESA). The maximum ionic charge state was q = 16, and the maximum energy was about 30 keV (q = 16) at the pulse duration of 150 ps under the laser intensity of IL = 2 × 1012 W/cm2. At the pulse duration of 6 ns under the same laser intensity of IL = 2 × 1012 W/cm2 by a control of a laser pulse energy and a focal spot diameter, the maximum ionic charge state was q = 15, and the maximum energy was 15 keV (q = 10), approximately half of that in the case of the pulse duration of 150 ps.
We evaluated the charge-separated spectra of highly charged suprathermal gadolinium (Gd) ions from a 1064-nm, nanosecond laser-produced plasma (LPP) extreme ultraviolet (EUV) source developed for beyond EUV (BEUV) lithography. The charge distribution of these suprathermal ions emitted from a solid planar Gd target was measured by an electrostatic energy analyzer (ESA). The maximum ionic charge state was observed to be Z = 16 and to possess a maximum energy of about 15 keV at the optimum laser intensity of 2 x 1012 W/cm2 to produce the efficient 6.7-nm EUV emission. This evaluation provides important information essential for the development of debris mitigation schemes in the BEUV source for next generation lithography.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.