To obtain high removal rate and low damages in machining of hard and brittle material,an optical fabrication technology based on fixed abrasive diamond pellets(FADPs) elasticity tool(ET) is proposed. In this paper, we focus on improve the removal efficiency and surface quality by optimizing process parameters, which including speed ratios, eccentricity, spindle speed, pressure, diamond granularity and dwell time. Removal function (RF) model of ET is proposed and optimized. Effects of process parameters on the removal efficiency and surface roughness are illustrated by series of simulation and experiments. Experiment results indicate increasing spindle speed can improve removal efficiency and surface roughness. Orthogonal experiment indicates diamond granularity have greatest impact on removal efficiency and surface roughness. In addition, the removal rate 11.26 mm3/min and surface roughness Ra 4.89 nm is obtained by 10 μm and 3 μm of FADPs respectively.
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