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Zhengang Lu

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Proceedings Article | 30 April 2024 Paper

Illumination pattern and path control through laser beam steering using a calibrated two-dimensional galvo scanner

Qi Zang, Shaozhe Cui, Weijie Wang, Tao Liang, Xiaolu Zhan, Wende Liu, Yingwei He, Zhengang Lu, Haiyong Gan

Proceedings Volume 13153, 1315318 (2024) https://doi.org/10.1117/12.3018684

KEYWORDS: Laser scanners, Galvanometers, Calibration, Mirrors, Beam controllers, Servomechanisms, Light sources and illumination, Laser frequency, Beam steering, Scanners

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The 2-D galvo scanners refer to motorized mirror mounts and systems specifically designed for applications involving laser-beam steering or scanning. They excel in swiftly manipulating small laser beams, offering exceptional levels of accuracy and precision. Functioning as dynamic electro-optical components, galvo scanners employ a rotatable mirror with low inertia to accurately position a laser beam with a high degree of precision and repeatability. In a series of applications, achieving a repeatability of less than 2 μrad is critical for galvo scanner. However, the galvo scanner system could suffer from optical and control errors because of lacking researchers’ intervention. These errors may give rise to deviations between the actual motion of the galvo scanner and the desired motion, then impede the precise positioning and control of the beam. Hence, an exceedingly precise and accurate calibration of the galvo scanner is imperative to attain high-precision control. To realize the standard accuracy of 0.3 mm in applications, current methods still keep imperfections. To evaluate the accuracy of the galvanometer's scanning beam location across a specified voltage range and the variations in its scanning capabilities with signal frequency, this research introduces a high-precision calibration measurement method for the 2-D galvo scanner. This method serves as a valuable resource for future studies on galvanometer scanner calibration and trajectory matching algorithms, establishing a research foundation for the eventual implementation of uniform light field illumination by galvanometers.

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