Based on the polarization splitting principle of the only-phase liquid crystal device, a common path phase-shifting interferometry is built to measure the whole and local phase modulation characteristics of a liquid-crystal spatial light modulator (LC-SLM) with high spatial resolution and high gray level. In this technique, the SLM is not only a device to be measured but also an optical component that is used to splitting the incident linearly polarized light. A specially designed control grayscale image is loaded into the SLM, and then several frames of phase-shifted interferograms are recorded. The wavefront phase can be calculated by using the phase-shifting algorithm. Through changing the loaded images, the phase modulation curve is obtained. The experimental steps and results are presented in the paper, and the uniformity of local phase modulation is also evaluated. The proposed method has stable measuring results and has the advantage of simple principle and convenient operation.
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