Dr. Kuaixia Ren Profile

Dr. Kuaixia Ren

at Semiconductor Manufacturing International Corp

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Publications (1)

Proceedings Article | 8 October 2014 Paper

The defect printability study for 28nm mode mask

Catherine Ren, Eric Guo, Irene Shi, Eric Tian

Proceedings Volume 9235, 923523 (2014) https://doi.org/10.1117/12.2066099

KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Scanners, Critical dimension metrology, Defect inspection, Defect detection, Image processing, Lithography, Polarization

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