Mr. Moojoon Shin Profile

Moojoon Shin

OPC engineer at Samsung Electronics Co. Ltd.

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Publications (2)

Proceedings Article | 28 April 2023 Paper

Fast and accurate machine learning assisted mask optimization

Moojoon Shin, Sooyong Lee, Joonsung Kim, Seung-Hune Yang, Heedon Hwang

Proceedings Volume 12495, 124951S (2023) https://doi.org/10.1117/12.2658321

KEYWORDS: Optical proximity correction, Machine learning, Artificial neural networks

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SPIE Journal Paper | 18 November 2016

Accurate lithography hotspot detection using deep convolutional neural networks

Moojoon Shin, Jee-Hyong Lee

JM3, Vol. 15, Issue 04, 043507, (November 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.4.043507

KEYWORDS: Convolutional neural networks, Lithography, Inspection, Neural networks, Machine learning, Convolution, Feature extraction, Data modeling, Semiconductors, Calibration

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