Motorized stages are widely used in the fields of processing and measurement, such as lithography, semiconductor packaging, biochips, and micro/nanostructure characterization. We propose a tightly focused laser marking method for measuring the motion performance of motorized stages. In this method, a test sample is coated with heat-mode resist thin films and is fixed onto motorized stages. A tightly focused laser spot with a size of ∼520 nm irradiates the heat-mode resist thin films, which then absorb the laser energy and are heated. A laser-induced marking of the films’ structural change from an amorphous state to a crystalline state occurs when the temperature exceeds the crystallization threshold temperature. The motion locus and performance of motorized stages can be clearly observed via the marking of the structural change of heat-mode resist thin films, which can be further clarified through the lithography developing process in alkaline or acidic solutions. The measurement results showed that the minimum nonuniformity coefficient of the motorized stages was 0.016, the minimum parallelism error was 80 nm, the minimum positional accuracy was 0.76 μm, and the accuracy of the measurement system was within 80 nm. The test results demonstrate that the motorized stage can achieve high-precision uniaxial motion with a period of 300 nm and biaxial coordinated motion with a period of <3 μm through parameter optimization, thereby reaching its ultimate performance. Compared to the non-interferometric methods, this tightly focused laser marking method has the advantages of strong environmental adaptability and high accuracy. This study provides an effective and convenient approach for the measurement and optimization of the motion performance of motorized stages.
As a crucial part of a high-speed polar coordinate laser writing system, the alignment of the rotatory stage axis and the writing laser optical axis has been a key point that influences the accuracy of the whole system and the fabrication patterns. An alignment method of the rotatory stage axis and the writing laser optical axis is proposed. An alignment system is established and the imaging subsystem is calibrated by a high precision calibration object. A circle center lookup algorithm is applied to find the axis of the rotary stage. The accuracy of the alignment could reach 400 nm. The results of the alignment indicate that the proposed alignment method is a good method for the alignment of the rotary stage axis and the writing laser optical axis. The proposed alignment is useful in the fields of high-resolution maskless laser lithography in polar coordinates.
In the field of laser photolithography, automatic focusing is a key technology. The focusing degree of the writing light on the sample surface determines the quality of photolithography. In addition to the mask manufacturing in semiconductor industry, autofocus is also widely used in optical imaging and optical information reading. With the increasing demand of semiconductor market, it is necessary to reduce the cost of autofocus as much as possible on the premise of ensuring the accuracy. Dual-quadrant detector(DQD) is a kind of detector combining two photodetectors, in which the common edge of two photodetectors is usually a straight line. In this work, a defocusing detection method using a dual-quadrant detector is proposed, the expression of focusing error signal(FES) is defined. The relationship between defocus amount and FES is analyzed and simulated, accordingly. A focusing error detection system is established to demonstrate the theoretical analysis. The tracking range is up to 20μm, and the tracking accuracy is approximately 50. The theoretical and experimental results indicate that the defocusing detection method with a dual-quadrant detector takes into account the tracking range and tracking accuracy, and has good results. This technology is expected to be used in maskless laser direct writing lithography and optical imaging.
KEYWORDS: LIDAR, Ranging, Sensors, Temperature metrology, Signal detection, Space operations, Control systems, Signal processing, Radar, Microwave radiation
Comparing to microwave radar, there are many advantages of Lidar including higher measure accuracy, finer time and space resolution, smaller volume, lighter mass. Lidar has become a very important method in high precision remote sensing domain in space. At home and abroad, Lidar has been made widely applied in space rendezvous and docking of spacecraft. Ranging accuracy is one of the important indicators of Lidar performance. The ranging precision of Lidar will be affected by temperature environment when used in space. In this paper, the results show that the value of rang measured becomes bigger and bigger as environment temperature increasing. When the temperature changes from 20°C to 60°C, the time delay between emitting and receiving optical signal increases 6.8 ns, which means the range measured increasing 1.02 m. This change will induce great influence to rendezvous and docking process when working at short range. Therefore, it is necessary to give a reasonable value on temperature control when Lidar working on-orbit to satisfy the indicator of ranging accuracy.
In space laser communication, optical antennas are one of the main components and the precision of optical antennas is very high. In this paper, it is based on the R-C telescope and it is carried out that the design and simulation of optical lens and supporting truss, according to the parameters of the systems. And a finite element method (FEM) was used to analyze the deformation of the optical lens. Finally, the Zernike polynomial was introduced to fit the primary mirror with a diameter of 250mm. The objective of this study is to determine whether the wave-front aberration of the primary mirror can meet the imaging quality. The results show that the deterioration of the imaging quality caused by the gravity deformation of primary and secondary mirrors. At the same time, the optical deviation of optical antenna increase with the diameter of the pupil.
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