Roof Edge Test (RET) For Micro-Roughness

P Langenbeck

doi:10.1117/12.967106

1 January 1987 Roof Edge Test (RET) For Micro-Roughness

P Langenbeck

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967106
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Roughness of micromachined surfaces and certain error motions occuring in micromachi ning may be determined by evaluating the mechanical interaction between two surfaces micro-machined successively on a substrate such as to form a small prismatic angle of, say, 1 arc.sec. Thereby a ridge is generated with a texture interlacing the two individual cutting patterns. Such substrate calibrates the phase - or interference - contrast image of samples in a range extending below about λ /20. Below that limit, it is impossible to correlate the image intensity profile with the surface relief. With RET one can measure the depth of machining profile in the order of between 0.01 and 0.005 pm, using a common microscope.

Citation Download Citation

P Langenbeck "Roof Edge Test (RET) For Micro-Roughness", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967106

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