Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection

Quang Sang Vo; Xiaodong Zhang; Fengzhou Fang; Linlin Zhu

doi:10.1117/12.2505863

15 November 2018 Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection

Quang Sang Vo, Xiaodong Zhang, Fengzhou Fang, Linlin Zhu

Author Affiliations +

Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 109642W (2018) https://doi.org/10.1117/12.2505863
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

Measurement of the surface profiles of machined workpieces is becoming increasingly important to the progress of ultra-precision engineering. Optical non-contact probe is fit for measuring small, thin, soft parts, and it will not cause abrasion damage for the fragile surface of the workpiece. Astigmatic detection systems (ADS) based on the commercial digital versatile disk (DVD) optical pickup heads (OPH) are in widespread use for this purpose due to its well-established standards, high detection bandwidth, compact size, low cost and ease of use. Unfortunately, it has some serious drawbacks relating to issues concerning about dynamic characteristic, low stability and accuracy. In this paper, a high precision displacement measurement system was constructed with a modified DVD optical head by using differential astigmatism focus error detection. The proposed system is cost-effective to quickly accurately estimate and correct systematic errors of four quadrant detector (4QD). Moreover, based on replaceable micoscope objective and automatism testing system of 4QD, it can also detect the two-dimensional angular tilt of the object surface. Our experimental results demonstrated that the OPH showed about 8um measuring range and 20nm resolution.

Citation Download Citation

Quang Sang Vo, Xiaodong Zhang, Fengzhou Fang, and Linlin Zhu "Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109642W (15 November 2018); https://doi.org/10.1117/12.2505863

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