Langasite-based BAW resonator coated with ZnO for high temperature CO2 gas sensing with temperature compensation (Conference Presentation)

Chen Zhang; Abhishek Ghosh; Haifeng Zhang

doi:10.1117/12.2517034

29 March 2019 Langasite-based BAW resonator coated with ZnO for high temperature CO2 gas sensing with temperature compensation (Conference Presentation)

Chen Zhang, Abhishek Ghosh, Haifeng Zhang

Author Affiliations +

Proceedings Volume 10970, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019; 109702B (2019) https://doi.org/10.1117/12.2517034
Event: SPIE Smart Structures + Nondestructive Evaluation, 2019, Denver, Colorado, United States

Abstract

This paper presents the design and testing of a new CO2 gas sensor that is based on a piezoelectric Langasite (La3Ga5SiO14) crystal resonator with temperature compensation. CO2 gas concentration change can be measured by monitoring frequency shift due to the adsorption of CO2 gas molecules. The sensor is designed and fabricated as a body acoustic wave (BAW) resonator, and coated with Zinc Oxide thin film for sensitivity improvement. Then it is experimentally tested in the laboratory with a self-designed, temperature controlled gas chamber at a wide CO2 concentration range. Moreover, temperature compensation is formulated and tested by applying the dual mode behavior of the Langasite BAW resonator. The sensor shows a good relationship between CO2 gas concentration and its resonant frequency shift. The proposed sensor can be applied at high temperatures particularly in combustion engines, power plant and other high temperature applications.

Conference Presentation

Citation Download Citation

Chen Zhang, Abhishek Ghosh, and Haifeng Zhang "Langasite-based BAW resonator coated with ZnO for high temperature CO2 gas sensing with temperature compensation (Conference Presentation)", Proc. SPIE 10970, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019, 109702B (29 March 2019); https://doi.org/10.1117/12.2517034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available