Surface acoustic wave (SAW) device using piezoelectric cellulose EAPap: fabrication and characterization

Joo-Hyung Kim; Gyu-Young Yun; Sang-Dong Jang; Min-Hee Lee; Jaehwan Kim

doi:10.1117/12.815591

31 March 2009 Surface acoustic wave (SAW) device using piezoelectric cellulose EAPap: fabrication and characterization

Joo-Hyung Kim, Gyu-Young Yun, Sang-Dong Jang, Min-Hee Lee, Jaehwan Kim

Proceedings Volume 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009; 72910W (2009) https://doi.org/10.1117/12.815591
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

Novel smart materials have been suggested for various sensor applications such as chemical sensor, bio sensor, wireless communication, and radio frequency identification (RF-ID) devices. It was reported that bio-compatible and as well as bio-degradable, naturally abundant, and flexible piezoelectric cellulose electro-active paper (EAPap) had a great industrial potential due to its piezoelectricity. Here we studied the feasibility of surface acoustic wave (SAW) devices using thin piezoelectric cellulose EAPap. The single inter-digit transducer (IDT) pattern with 10 μm finger width was designed and fabricated on thin piezoelectric EAPap using lift-off technique. The frequency response to different vapor dose of isopropyl alcohol under will be presented.

Citation Download Citation

Joo-Hyung Kim, Gyu-Young Yun, Sang-Dong Jang, Min-Hee Lee, and Jaehwan Kim "Surface acoustic wave (SAW) device using piezoelectric cellulose EAPap: fabrication and characterization", Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910W (31 March 2009); https://doi.org/10.1117/12.815591

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