Precision measurement methods of wavefront error for meter-size planar optical components applied to ICF systems

Shijie Liu; Longbo Xu; Xu Zhang; You Zhou; Qi Lu; Yunbo Bai; Jianda Shao

doi:10.1117/12.2575126

10 October 2020 Precision measurement methods of wavefront error for meter-size planar optical components applied to ICF systems

Shijie Liu, Longbo Xu, Xu Zhang, You Zhou, Qi Lu, Yunbo Bai, Jianda Shao

Author Affiliations +

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 1155202 (2020) https://doi.org/10.1117/12.2575126
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

The giant laser device used in inertial confined fusion (ICF) experimental research is the largest optical engineering ever built by humans. It requires thousands of large-diameter optical components, especially for optical components with diagonal dimensions close to or exceeding 1 meter, which leads to the manufacturing is extremely difficult. Wavefront characteristics are one of the key parameters of meter-size optical components. Since different degrees of wavefront error are introduced during the material preparation, manufacturing and coating processes, it requires precise measurement and precise control throughout the manufacturing process. In this paper, the research work on key problems such as measurement accuracy, measurement aperture and measurement efficiency in the wavefront error detection of meter-size optical components is carried out and summarized.

Conference Presentation

Citation Download Citation

Shijie Liu, Longbo Xu, Xu Zhang, You Zhou, Qi Lu, Yunbo Bai, and Jianda Shao "Precision measurement methods of wavefront error for meter-size planar optical components applied to ICF systems", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 1155202 (10 October 2020); https://doi.org/10.1117/12.2575126

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