Recent progress and future trends in MOCVD growth technology for light emitting diodes

Michael Heuken; Adam Boyd; Assadullah Alam; Hassan Larhrib; Arthur Beckers

doi:10.1117/12.2575628

5 March 2021 Recent progress and future trends in MOCVD growth technology for light emitting diodes

Michael Heuken, Adam Boyd, Assadullah Alam, Hassan Larhrib, Arthur Beckers

Proceedings Volume 11706, Light-Emitting Devices, Materials, and Applications XXV; 117060Z (2021) https://doi.org/10.1117/12.2575628
Event: SPIE OPTO, 2021, Online Only

Abstract

To enable LED technology we developed the MOCVD technology for III-As/P/N based structures in reactors ranging from small scale to large production scale Planetary Reactors. The closed coupled showerhead reactor series (CCS reactor) and the Planetary Reactor® developed in parallel and both gave production proven results. The focus of epitaxy production technology developments has been put on improved process control, productivity enhancements, in-situ metrology for smart system control and predictive maintenance. A comprehensive summary and recent progress will be reported here. The application of the underlying physical, technical and chemical fundamentals explain the engineering concept.

Conference Presentation

Citation Download Citation

Michael Heuken, Adam Boyd, Assadullah Alam, Hassan Larhrib, and Arthur Beckers "Recent progress and future trends in MOCVD growth technology for light emitting diodes", Proc. SPIE 11706, Light-Emitting Devices, Materials, and Applications XXV, 117060Z (5 March 2021); https://doi.org/10.1117/12.2575628

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available