A variable profile depth crossed-grating-based exit pupil expander with improved imaging brightness uniformity

Qimeng Wang; Yuxuan Zhao; Lijiang Zeng

doi:10.1117/12.2597839

9 October 2021 A variable profile depth crossed-grating-based exit pupil expander with improved imaging brightness uniformity

Qimeng Wang, Yuxuan Zhao, Lijiang Zeng

Author Affiliations +

Proceedings Volume 11898, Holography, Diffractive Optics, and Applications XI; 118981I (2021) https://doi.org/10.1117/12.2597839
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

A hybrid optimization model of physical optics and geometric optics is implemented for optimizing the imaging brightness uniformity by changing the profile depth distribution of a grating-based exit pupil expander (EPE). A specially modified reactive ion-beam etching system capable of modulating the etching depth distribution in two orthogonal dimensions is used to fabricate crossed-grating-based EPEs with variable profile depth. Two EPEs with uniform profile depth and optimized variable profile depth are fabricated and measured. The results show that compared with using the EPE with uniform profile depth, using the EPE with optimized variable profile depth, the imaging brightness uniformity can be improved by 37.8%.

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Qimeng Wang, Yuxuan Zhao, and Lijiang Zeng "A variable profile depth crossed-grating-based exit pupil expander with improved imaging brightness uniformity", Proc. SPIE 11898, Holography, Diffractive Optics, and Applications XI, 118981I (9 October 2021); https://doi.org/10.1117/12.2597839

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