Driving exposure accuracy and cost-of-ownership on DUV immersion and dry-NXT scanner products

Wim de Boeij; Bart Smeets; Massimo Viola; Peter van Gils; Elliot Oti; Stefan Lichiardopol; Jelmer Kamminga; Mohamed El Kodadi; Aditya Deshpande; Alberto Pirati

doi:10.1117/12.3009961

10 April 2024 Driving exposure accuracy and cost-of-ownership on DUV immersion and dry-NXT scanner products

Wim de Boeij, Bart Smeets, Massimo Viola, Peter van Gils, Elliot Oti, Stefan Lichiardopol, Jelmer Kamminga, Mohamed El Kodadi, Aditya Deshpande, Alberto Pirati

Author Affiliations +

Proceedings Volume 12953, Optical and EUV Nanolithography XXXVII; 129530S (2024) https://doi.org/10.1117/12.3009961
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Abstract

In this paper we will report on the most recent immersion scanner innovations to improve scanner matching overlay. These are realized by improvements in e.g. optical column distortion, wafer alignment and system-metrology. We will elaborate on scanner solutions for wafer handling/chucking of warped wafers. Furthermore, to enable cost-of-ownership reduction, system design implementations driving larger scanner productivity (wafer per hour) will be presented.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wim de Boeij, Bart Smeets, Massimo Viola, Peter van Gils, Elliot Oti, Stefan Lichiardopol, Jelmer Kamminga, Mohamed El Kodadi, Aditya Deshpande, and Alberto Pirati "Driving exposure accuracy and cost-of-ownership on DUV immersion and dry-NXT scanner products", Proc. SPIE 12953, Optical and EUV Nanolithography XXXVII, 129530S (10 April 2024); https://doi.org/10.1117/12.3009961

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available