Performance of multilayer-coated figured optics for soft x-rays near the diffraction limit

Eric L. Raab; Donald M. Tennant; Warren K. Waskiewicz; Alastair A. MacDowell; Richard R. Freeman

doi:10.1117/12.23183

1 February 1991 Performance of multilayer-coated figured optics for soft x-rays near the diffraction limit

Eric L. Raab, Donald M. Tennant, Warren K. Waskiewicz, Alastair A. MacDowell, Richard R. Freeman

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23183
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The imaging performance of a spherical mirror was measured at 14nm. A Foucault knife-edge test was used to determine the focal spot size formed by a 400 mm radius mirror at a numerical aperture of 0.04. The image formed by the mirror is compared with a single-layer AuPd coating is compared with that formed when coated with a Mo/Si multilayer. By fitting the results with a diffraction model, it is possible to quantify the change in effective surface figure caused by the multilayer. It is concluded that a multilayer-coated mirror can perform at the diffraction limit under certain conditions.

Citation Download Citation

Eric L. Raab, Donald M. Tennant, Warren K. Waskiewicz, Alastair A. MacDowell, and Richard R. Freeman "Performance of multilayer-coated figured optics for soft x-rays near the diffraction limit", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23183

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