Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator

Hiroshi Goto; Koichi Imanaka

doi:10.1117/12.49393

1 November 1991 Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator

Hiroshi Goto, Koichi Imanaka

Author Affiliations +

Proceedings Volume 1544, Miniature and Micro-Optics: Fabrication and System Applications; (1991) https://doi.org/10.1117/12.49393
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A novel super compact dual axis optical scanner composed of a miniature resonator driven by a piezoelectric actuator and a micro-collimated light source using a micro Fresnel lens has been developed. The scanner is able to scan an optical beam in two directions with a scanning angle of more than 20 degrees, and its dimensions are 30 mm X 20 mm X 20 mm.

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Hiroshi Goto and Koichi Imanaka "Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49393

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