Methods and apparatus for laser beam scanners with different actuating mechanisms

Si-hai Chen; Si-hua Xiang; Xin Wu; Shan Dong; Ding Xiao; Xia-wei Zheng

doi:10.1117/12.836190

29 August 2009 Methods and apparatus for laser beam scanners with different actuating mechanisms

Si-hai Chen, Si-hua Xiang, Xin Wu, Shan Dong, Ding Xiao, Xia-wei Zheng

Proceedings Volume 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging; 73825G (2009) https://doi.org/10.1117/12.836190
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

In this paper, 3 types of laser beam scanner are introduced. One is transmissive beam scanner, which is composed of convex and concave microlens arrays (MLAs). By moving the concave lens in the plane vertical to the optical axis, the incident beam can be deflected in two dimensions. Those two kinds of MLAs are fabricated by thermal reflow and replication process. A set of mechanical scanner frame is fabricated with the two MLAs assembling in it. The testing result shown that the beam deflection angles are 9.5° and 9.6°, in the 2 dimension(2D) with the scanning frequency of 2 HZ and 8 HZ, respectively. The second type of laser beam scanner is actuated by voice coil actuators (VCAs). Based on ANSOFT MAXWELL software, we have designed VCAs with small size and large force which have optimized properties. The model of VCAs is built using AutoCAD and is analyzed by Ansoft maxwell. According to the simulation results, high performance VCAs are fabricated and tested. The result is that the force of the VCAs is 6.39N/A, and the displacement is ±2.5mm. A set up of beam scanner is fabricated and actuated by the designed VCAs. The testing result shown that the two dimensional scanning angle is 15° and 10° respectively at the frequency of 60HZ. The two dimensional scanning angle is 8.3° and 6° respectively at the frequency of 100HZ. The third type of scanner is actuated by amplified piezoelectric actuators (APAs). The scanning mirror is actuated by the piezoelectric (PZ) actuators with the scanning frequency of 700HZ, 250HZ and 87HZ respectively. The optical scanning angle is ±0.5° at the three frequencies.

Citation Download Citation

Si-hai Chen, Si-hua Xiang, Xin Wu, Shan Dong, Ding Xiao, and Xia-wei Zheng "Methods and apparatus for laser beam scanners with different actuating mechanisms", Proc. SPIE 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging, 73825G (29 August 2009); https://doi.org/10.1117/12.836190

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KEYWORDS

Scanners

Actuators

Mirrors

Laser scanners

Microlens array

3D scanning

Beam steering

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