Paper
12 October 1994 Stability of phase-change optical disks produced by a pass-through type sputtering system
Masaru Suzuki, Noriharu Morishita, Shun-ichi Tajima, Masafumi Nakao, Kazuhiro Nishimura, Miyoko Ohta
Author Affiliations +
Proceedings Volume 2338, 1994 Topical Meeting on Optical Data Storage; (1994) https://doi.org/10.1117/12.190186
Event: Optical Data Storage '94, 1994, Dana Point, CA, United States
Abstract
Mass production technology of phase-change rewritable disks can be achieved by using a pass-through type in-line sputtering system. The qualities of the mass-produced PCR disk were high enough to satisfy all the specifications for this product. We optimized the composition of the recording layer (SbTeGe alloy) of the PCR disk. It was found that a Ge content of more than 20 at% in the recording layer is necessary to achieve a long archival life. The mass-produced PCR disks were very stable in the accelerated aging test. The BER stayed at nearly the same value for 2000 hrs at 90 degree(s)C, 80% RH and 4000 hrs at 80 degree(s)C, 80% RH. The life of the PCR disks was estimated to be greater than 50 years at 30 degree(s)C, 80% RH. The activation energy for the PCR disks obtained from Arrhenius plots was 1.11 eV.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masaru Suzuki, Noriharu Morishita, Shun-ichi Tajima, Masafumi Nakao, Kazuhiro Nishimura, and Miyoko Ohta "Stability of phase-change optical disks produced by a pass-through type sputtering system", Proc. SPIE 2338, 1994 Topical Meeting on Optical Data Storage, (12 October 1994); https://doi.org/10.1117/12.190186
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KEYWORDS
Sputter deposition

Germanium

Optical storage

Optical discs

Reflectivity

Aluminum

Antimony

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