Effects of the film thickness and foreign element addition on the crystallization kinetics and optical properties of eutectic Sb70Te30 phase change recording film

Yung-Sung Hsu; Yung-Chiun Her; Shun-Te Cheng; Song-Yeu Tsai

doi:10.1117/12.557142

9 September 2004 Effects of the film thickness and foreign element addition on the crystallization kinetics and optical properties of eutectic Sb₇₀Te₃₀ phase change recording film

Yung-Sung Hsu, Yung-Chiun Her, Shun-Te Cheng, Song-Yeu Tsai

Author Affiliations +

Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.557142
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States

Abstract

The effects of the film thickness and foreign element addition on the crystallization kinetics and optical properties of eutectic Sb₇₀Te₃₀ phase change recording film have been studied. The crystallization temperature and activation energy for crystallization of the non-doped Sb₇₀Te₃₀ recording films were decreased from 161 to 145, 144, 141, and 125°C, and from 3.0 to 2.6, 2.3, 2.0, and 1.9 eV/atom, respectively, when the thickness was increased from 15 to 20, 25, 30 and 100 nm. For the Ag-doped Sb₇₀Te₃₀ recording film of 20 nm in thickness, the crystallization temperature was found to increase from 145 to 146 and 156°C, and the activation energy was found to decrease from 2.6 to 2.5 and 2.1 eV/atom, respectively, as the concentration of Ag was increased from 0 to 3.8 and 11.8 at%, respectively. Meanwhile, the crystallization temperature and activation energy of the 20-nm-thick In-doped Sb₇₀Te₃₀ film was found to increase from 145 to 153 and 168°C, and increased from 2.6 to 2.8 and 3.4 eV/atom, respectively, as the concentration of In was increased from 0 to 1.4 and 4.8 at%.

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Yung-Sung Hsu, Yung-Chiun Her, Shun-Te Cheng, and Song-Yeu Tsai "Effects of the film thickness and foreign element addition on the crystallization kinetics and optical properties of eutectic Sb₇₀Te₃₀ phase change recording film", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); https://doi.org/10.1117/12.557142

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