Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition

Alfred T. Jeffries III; David J. Brzozowy; Bernard T. Beauchemin Jr.; Ahmad A. Naiini; Edward A. Fitzgerald; Paula M. Gallagher-Wetmore

doi:10.1117/12.241845

14 June 1996 Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition

Alfred T. Jeffries III, David J. Brzozowy, Bernard T. Beauchemin Jr., Ahmad A. Naiini, Edward A. Fitzgerald, Paula M. Gallagher-Wetmore

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Proceedings Volume 2724, Advances in Resist Technology and Processing XIII; (1996) https://doi.org/10.1117/12.241845
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Supercritical fluids were used to fractionate a conventional 60 meta/40 para cresol novolac into five narrow polydispersivity fractions. Single and multiple fractions were esterified with a DNQ moiety and recombined to obtain a resist having essentially the same molecular weight and composition as the original parent novolac. Fractions 1 - 4 were esterified. An experimental design was constructed and the resulting selectively esterified novolacs were used to study resist properties as a function of the molecular weight and composition of the esterified fractions. Positive resists prepared from fraction 2 (MW 870 and 69% m-cresol), and fractions 2 and 4 (MW 3064 and 75% m-cresol) exhibited better performance compared to resists prepared from other selectively esterified fractions and the randomly esterified parent novolac.

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Alfred T. Jeffries III, David J. Brzozowy, Bernard T. Beauchemin Jr., Ahmad A. Naiini, Edward A. Fitzgerald, and Paula M. Gallagher-Wetmore "Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); https://doi.org/10.1117/12.241845

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