X-ray measurement of tungsten films grown in a nonflowing laser-induced CVD process

Elzbieta B. Jankowska-Kuchta; Carol McConica; Devin Moss; Janusz Kozlowski

doi:10.1117/12.309525

3 June 1998 X-ray measurement of tungsten films grown in a nonflowing laser-induced CVD process

Elzbieta B. Jankowska-Kuchta, Carol McConica, Devin Moss, Janusz Kozlowski

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309525
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

A lab scale nonflowing reactor was built to study chemical vapor deposition reactions and for the purpose of minimizing the waste of expensive high purity and toxic gases. The reactor operates as a batch process resulting in a time varying gas composition during the course of deposition. Samples were heated either resistively (thermal CVD) or with focused laser light (laser CVD). X-ray measurements were made on the deposited tungsten samples. Obtained results (tungsten structural parameters) were compared with the same parameters obtained for the tungsten films deposited in a commercial, flowing CVD process.

Citation Download Citation

Elzbieta B. Jankowska-Kuchta, Carol McConica, Devin Moss, and Janusz Kozlowski "X-ray measurement of tungsten films grown in a nonflowing laser-induced CVD process", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309525

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available