Fabrication of a thick nickel microvalve with truncated pyramid shape

In-Byeong Kang; Malcolm R. Haskard; Noel D. Samaan; Peter Orders

doi:10.1117/12.305560

16 April 1998 Fabrication of a thick nickel microvalve with truncated pyramid shape

In-Byeong Kang, Malcolm R. Haskard, Noel D. Samaan, Peter Orders

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305560
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Float type micro valves can be employed in very high output pressure micropumps. They provide a very large forward to reverse flow ratio with a low leakage flow rate at high applied pressures. The valve described in this paper is a thick metal 3D structure having an excellent dimension match to the valve orifice. The valve having a thick truncated pyramid shape was successfully manufactured using an electroplating process and a silicon mould. The mould was made by anisotropic silicon etching, the truncated pyramid shape being defined by <111> crystal planes. A fine and uniform nickel structure was obtained using an agitated nickelsulphamate electrolyte, buffered with boric acid. Because of precise crystal orientations this process allows the valve to fit snugly into the valve orifice.

Citation Download Citation

In-Byeong Kang, Malcolm R. Haskard, Noel D. Samaan, and Peter Orders "Fabrication of a thick nickel microvalve with truncated pyramid shape", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305560

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