Pupil illumination: in-situ measurement of partial coherence

Joseph P. Kirk; Christopher J. Progler

doi:10.1117/12.310757

29 June 1998 Pupil illumination: in-situ measurement of partial coherence

Joseph P. Kirk, Christopher J. Progler

Proceedings Volume 3334, Optical Microlithography XI; (1998) https://doi.org/10.1117/12.310757
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

Lithographic tool performance depends in part on the partial coherence (how the lens pupil is illuminated) during photoresist exposure. The partial coherence dial is set prior to exposure and it is usually assumed it correctly indicates actual pupil illumination. The validity of this assumption is tested in situ by utilizing a 'negative pinhole,' an occluding spot on the back side of a clear reticule, that forms a negative image of the pupil illumination. A quantitative sequence of dose contours is obtained from the resist boundaries of images formed by exposing positive photoresist through a clearing dose sequence. These contours are pieced together and generate a source file describing the illumination distribution that is used as input to a lithography simulator to determine tool performance under actual operating conditions.

Citation Download Citation

Joseph P. Kirk and Christopher J. Progler "Pupil illumination: in-situ measurement of partial coherence", Proc. SPIE 3334, Optical Microlithography XI, (29 June 1998); https://doi.org/10.1117/12.310757

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available