Simultaneous measurement of the root-mean-square roughness and autocorrelation length by optical method

Dalwoo Kim; Ki-Jang Oh; Choong-Soo Lim

doi:10.1117/12.334343

29 December 1998 Simultaneous measurement of the root-mean-square roughness and autocorrelation length by optical method

Dalwoo Kim, Ki-Jang Oh, Choong-Soo Lim

Author Affiliations +

Proceedings Volume 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV; (1998) https://doi.org/10.1117/12.334343
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

We developed an on-line measurement system for the simultaneous measurement of the root-mean-square roughness and autocorrelation length which are the parameters of surface roughness. The measurement is based on the scattering theory of light on the rough surface. Computer simulation shows that the measurement range depends on the wavelength of the light source, and this is verified with the experiment. We installed the measurement system at the finishing line of a cold-rolling steel work, and measured the two parameters in situ. The rms roughness and autocorrelation length are measured and transformed in the average surface roughness and then umber of peaks per inch, respectively. The measured data for both of the parameters are compared with those of stylus method, an the optical method is well coincided with the conventional stylus method.

Citation Download Citation

Dalwoo Kim, Ki-Jang Oh, and Choong-Soo Lim "Simultaneous measurement of the root-mean-square roughness and autocorrelation length by optical method", Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); https://doi.org/10.1117/12.334343

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