Dual laser probe for testing surface roughness and microdisplacement

Shihua Wang; Chongjiu Jin; Tao Zhang; Zhaofei Zhou

doi:10.1117/12.402754

6 October 2000 Dual laser probe for testing surface roughness and microdisplacement

Shihua Wang, Chongjiu Jin, Tao Zhang, Zhaofei Zhou

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402754
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

As a practical monitoring tool for measurements of surface roughness and micro-displacement, an optical implementation of the method based on light scattering for measuring surface roughness and optical triangulation for measuring micro- displacement is proposed. The technique enables evaluation of the surface roughness and micro-displacement of specimen by using only one device. The measuring principle and basic analysis applied in the design are described in detail, after which the validity of the principle is demonstrated by the results of experimental evaluations. Experimental results show that micro-displacement measuring linear range within ± 300 μm can be obtained for measurements of specimen of surface roughness with R_a from 0.005μm to 0.1 μm.

Citation Download Citation

Shihua Wang, Chongjiu Jin, Tao Zhang, and Zhaofei Zhou "Dual laser probe for testing surface roughness and microdisplacement", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402754

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