Subwavelength-sized phase-change recording with a silicon planar apertured probe

Takashi Yatsui; Motonobu Kourogi; Kazuo Tsutsui; Junichi Takahashi; Motoichi Ohtsu

doi:10.1117/12.363844

22 September 1999 Subwavelength-sized phase-change recording with a silicon planar apertured probe

Takashi Yatsui, Motonobu Kourogi, Kazuo Tsutsui, Junichi Takahashi, Motoichi Ohtsu

Proceedings Volume 3791, Near-Field Optics: Physics, Devices, and Information Processing; (1999) https://doi.org/10.1117/12.363844
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We propose and demonstrate a new optical near-field slider with a planar apertured probe array for optical memory. The slider was fabricated by utilizing anisotropical etching of a silicon membrane and anodic bonding of a silicon membrane and glass substrate. We also present for the first time a subwavelength-sized phase-change recording/reading by using the planar apertured probe array. Apertures were fabricated at the bottom end of the pyramidal grooves. A SiO₂/AgInTe₂/glass substrate was used as the recording medium. By scanning the planar apertured probe array, we obtained resolved images with line width of 250 nm.

Citation Download Citation

Takashi Yatsui, Motonobu Kourogi, Kazuo Tsutsui, Junichi Takahashi, and Motoichi Ohtsu "Subwavelength-sized phase-change recording with a silicon planar apertured probe", Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); https://doi.org/10.1117/12.363844

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